DAMAGE EFFECTS OF ION/ATOM BEAM MILLING ON MNOS (Al/Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf>/Si) CAPACITORS.
Bangert, U. and Belson, J. and Wilson, I.H. (1983) DAMAGE EFFECTS OF ION/ATOM BEAM MILLING ON MNOS (Al/Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf>/Si) CAPACITORS.. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms :370-373