Damage effects of ion atom beam milling on MNOS (Al/Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf>/Si) capacitors
Bangert, U. and Belson, J. and Wilson, I.H. (1984) Damage effects of ion atom beam milling on MNOS (Al/Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf>/Si) capacitors. Nuclear Inst. and Methods in Physics Research, B :370-373