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A simple cell for the analysis of nanoelectromechanical systems under gas pressure
O. Svitelskiy, N. Liu, V. Sauer, K-M. Cheng, E. Finley, M. Belov, M. R. Freeman, and W. K. Hiebert
(2008)
A simple cell for the analysis of nanoelectromechanical systems under gas pressure in Review Of Scientific Instruments