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Damage effects in silicon and MNOS structures caused by beams of ionized and neutral argon atoms with energies below 5 keV
Bangert, U. and Jeynes, C. and Goodhew, P. and Wilson, I.
(1984)
Damage effects in silicon and MNOS structures caused by beams of ionized and neutral argon atoms with energies below 5 keV in Vacuum 10.1016/0042-207X(84)90121-0