Damage effects in silicon and MNOS structures caused by beams of ionized and neutral argon atoms with energies below 5 keV
(1984)
Damage effects in silicon and MNOS structures caused by beams of ionized and neutral argon atoms with energies below 5 keV in Vacuum 10.1016/0042-207X(84)90121-0
Damage effects in silicon and MNOS structures caused by beams of ionized and neutral argon atoms with energies below 5 keV in Vacuum 10.1016/0042-207X(84)90121-0