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DAMAGE EFFECTS OF ION/ATOM BEAM MILLING ON MNOS (Al/Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf>/Si) CAPACITORS.
Bangert, U. and Belson, J. and Wilson, I.H.
(1983)
DAMAGE EFFECTS OF ION/ATOM BEAM MILLING ON MNOS (Al/Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf>/Si) CAPACITORS. in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms