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Damage effects of ion atom beam milling on MNOS (Al/Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf>/Si) capacitors
Bangert, U. and Belson, J. and Wilson, I.H.
(1984)
Damage effects of ion atom beam milling on MNOS (Al/Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf>/Si) capacitors in Nuclear Inst. and Methods in Physics Research, B 10.1016/0168-583X(84)90093-4